| 摘要 |
PURPOSE:To attain to enhance measuring accuracy, by detecting not only the eccentric quantity of the deflective rotary motion of a high speed rotary body but alto the notch formed to the shaft part between gas bearings by the sensors arranged between the gas bearings and an imbalance generation part. CONSTITUTION:A turbine shaft 1 is constituted by integrally forming a blower blade 3 one end of a shaft part 2 and a dynamic blade 4 to the other end thereof and the shaft part 2 are supported by gas bearings 5a, 5b at positions in the vicinity of both ends thereof. Electrostatic capacity type sensors 6a, 6b are arranged between the blower blade 3 and the bearing 5a and between the dynamic blade 4 and the bearing 5b and, further, not only a notch 7 for detecting the position of the angle of rotation but also an electrostatic capacity type sensor 8 for detecting the notch 7 are arranged to the shaft part 2 between the bearings 5a, 5b. When driving gas is high speed, the shaft 2 generates deflective rotary motion if the blower blade 3 or the dynamic blade 4 has unbalance and said motion is detected by the sensors 5a, 5b. The angle-of-rotation position of unbalance is detected from the position of the notch 7 detected by the sensor 8.
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