| 摘要 |
PURPOSE:To improve a thermal radiation efficiency by providing projecting strips on the inner wall surface of a furnace core tube to increase the surface area of the inner wall surface. CONSTITUTION:Since projecting strips 4 are formed on the inner wall surface of a furnace core tube 2, the surface area of the inner wall increases. After heated by a heater 3 to a predetermined temperature, gas of a predetermined flow rate is fed from an inlet into the tube, reacted with a semiconductor sub strate, then fed out of the tube, and exhausted to a duct. The temperature in the tube 2 is held at a predetermined value by the strips 4 in the tube 2 at this time to improve thermal uniformity.
|
