| 摘要 |
PURPOSE:To control the total flow rate value within a proper range by totalizing the flow rate values of each filter device controlled so that the even flow rate passes for calculation of the total flow rate value and controlling this total value toward the set constant value. CONSTITUTION:A total flow rate computing element 16 adds the flow rate values shown by the flow rate signals S5a-S5c in response to these signals given from the flow rate detectors 4a-4c for calculation of the total flow rate value and delivers the total flow rate signal St showing the result of said calculation. An additional 2nd controller 12 keeps the balance between the signal St and the total flow rate set value signal S15 showing the total flow rate value set previously and then supplies the operating output signals all at once to the 1st controllers 6a-6c in the form of the even flow rate designating signal S14. Thus the control valves 7a-7c of separation paths 2a-2c are controlled so that the total flow rate value of the fluids to be processed which are evenly allocated and pass through those paths 2a-2c are equal to the set total flow rate value.
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