| 摘要 |
PURPOSE:To prevent a surface to be treated from damaging, contaminating, rising at its temperature by controlling incident amount and direction to the surface with active particles as electrically neutral particles, and selecting particle seeds mainly reacted with the surface. CONSTITUTION:Active particles formed of an active particle generator 1 become electrically neutral by a neutralizer 2, are aligned in the directions by a direction controller 3, then incident to a wafer 4, and the wafer 4 is held through a temperature controller 5 at a sample base 6. A raw material gas is fed through a pipe 9 to a chamber 8, DC or high frequency voltage is applied to electrodes 10, 10' to generate a discharge. The type and the quantity of the active particles are controlled by the generating means. When the discharge gas type is varied and the type of the active particles, the pressure of the discharge gas and the incident power are altered, the quantity of the active particles can be changed. Thus, the surface of the sample can be accurately treated without damaging, contaminating rising of the temperature.
|
