| 摘要 |
PURPOSE:To enable fine machining of high accuracy, by controlling the electric power for the arc of an ion source in terms of the detection signal for the accelerating current of the ion source to maintain the minimum divergence angle and prescribed quantity of a beam to make the form and time of machining accurate. CONSTITUTION:A controller 8 made of a comparison circuit employing an operational amplifier uses the difference from a reference voltage, as a control signal, to regulate the output current of a filament to control the temperature thereof, and to regulate the arc current of an arc power supply to perform control to keep an accelerating current constant. As a result, the divergence angle of an ion beam is kept minimum and the quantity thereof is maintained at a prescribed value, to make the form and time of machining accurate to enable fine machining of high accuracy by the ion beam.
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