| 摘要 |
<p>PURPOSE:To save the time needed to analyze the factor for the interlock produced during the operation of a device, by using the software to study the factor of the interlock and displayed the analyzing procedure of the factor on a display means. CONSTITUTION:It is impossible to open a gate valve 12 if the conditions where an RF power supply 20 is kept off are not satisfied. Under such conditions, the interlock No. allocated previously is displayed. If the conditions where both valves 13 and 14 are closed are satisfied, the screens (a, b and c) are turned on. While a screen (c) is blinked with screens (i) and (m) turned off if the conditions where the power supply 20 is turned off. If the conditions where a processing room 10 and a carrier room 11 are vacuum are satisfied, the screens (d, e and j) are turned on. Then a screen (l) is turned of if the screen (j) or the screen (k) is turned on.</p> |
