| 摘要 |
PURPOSE:To improve the wear resistance of a member having a mechanical sliding part by successively forming a film contg. N and a ceramic film consisting of nonmetallic elements on the surface of the member by surface treatment. CONSTITUTION:Mechanically worked shafts 14a-14n are placed in a reactor 11, the reactor 11 is evacuated and gaseous nitrogen is introduced into the reactor 11 from a gas introducing pipe 20. Glow discharge is caused with a high frequency power source 18 to generate nitrogen plasma between an elec trode 16 and the shafts 14a-14n. By the plasma, iron nitride (Fe3N4) is formed on the surfaces of the shafts 14a-14n. The flow rate of gaseous nitrogen is then reduced, gaseous silane (SiH4) is introduced into the reactor 11 and plasma is generated to form a silicon nitride film on the iron nitride. By this surface treatment, the wear resistance of the shafts is improved and the stripping of the resulting ceramic film consisting of nonmetallic elements can be prevented because the adhesive property is improved.
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