| 摘要 |
PURPOSE:To reduce dust adhered on the surface of a matter to be processed and to improve the quality and the yield by a method wherein, when the matter to be processed is in a non-processing state, a cover is always placed on the matter to be processed. CONSTITUTION:A material W to be processed is processed in a vacuum or reduced pressure. At that time, a cover 6 is always placed on the matter W to be processed when the matter W to be processed is in a non-processing state. Such a metal as nickel and stainless steel is used as the material for the cover 6. Whereupon, as the cover 6 is always placed on the matter W to be processed at the initial time of exhaust and at the initial time of leak, the adhesion of dust to the surface of the matter W to be processed is remarkedly reduced. In this way, the quality and the yield are improved.
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