| 摘要 |
PURPOSE:To enable the removal of a resist in a short time by adding a specified aralkylamine. CONSTITUTION:This aqueous removing soln. contains an aralkylamine represented by the formula (where Aryl is an optionally substituted aromatic group, each of R<1> and R<2> is H or alkyl and R<3> is optionally substituted alkylene). Phenethylamine may be used as the aralkylamine represented by the formula. The removing soln. is preferably used as an aqueous soln. having >=50wt% concn. When the concn. is extremely low, a long time is required to remove a resist. |
