| 摘要 |
PURPOSE:To prevent the titled member from the generation of an interference fringe by constituting the surface layer of the titled member of a multiple layer having a wear-resisting layer at the most outer layer thereof and an antireflection layer at the inner layer thereof, and by forming plural concave and convex shapes due to a spherical trace cavities, and further by forming the plural minute projection and recessed shapes within said spherical trace cavity. CONSTITUTION:When the surface layer 103 is constituted of the multiple layer having the wear-resisting layer at the most outer layer thereof, and the antireflection layer at the inner layer thereof, the reflection of an incident light is prevented at the interface of the surface layer 103 and the photosensitive layer 102, and the problems of the interference fringe and the sensitivity resulted from irregularity of the layer due to the formation of the surface layer 103 and/or the wear of the surface layer 103 is solved. By forming plural concave and convex shapes due to the spherical trace cavities and further forming the plural minute projection and recessed shapes within the spherical trace cavity on the surface of the substrate 101, the problem of appearing the interference fringe in the formation of the image is remarkably solved. |
