摘要 |
PURPOSE:To prevent the titled member from the generation of an interference fringe by forming the titled member of a photosensitive layer and a surface layer on a substrate and by forming the surface layer of a wear-resisting layer and an antireflection layer, and by forming plural concave and convex shapes due to a spherical trace cavities, and further by forming the plural minute projection and recessed shapes within said spherical trace cavity. CONSTITUTION:The titled member is provided with a light receiving layer having the photosensitive layer 102 composed of a noncrystalline material contg. a silicone atom and at least one of a germanium atom or a tin atom, and having the surface layer 103 on the substrate 101. The surface layer 103 of the titled member is composed of the multiple layer having the wear-resisting layer at the most outer layer thereof, and the antireflection layer at the inner layer thereof whereby the reflection of an incident light is prevented at the interface of the surface layer 103 and the photosensitive layer 102, and the problems of the interference fringe and the sensitivity resulted from the irregularity of the layer due to the formation of the surface layer 103 and/or the wear of the surface layer 103 is solved. And by forming plural concave and convex shapes due to the spherical trace cavities and further forming the plural minute projection and recessed shapes within the spherical trace cavity on the surface of the substrate 101, the problem of appearing the interference fringe in the formation of the image is remarkably solved.
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