发明名称 APPARATUS AND METHOD FOR DETECTING LUMINOUS INTENSITY
摘要 PURPOSE:To remove the effect of the change in the quantity of light due to the voltage variation of a power source, by detecting the light of a light source and processing light output detected corresponding to the information of the power source of the light source. CONSTITUTION:A moving apparatus (stepping motor) 17 is controlled by a stepping motor controller 15 to position a light detector 1 at a detection point 1. The quantity of the detected light is amplified and converted by an A/D converter 7 to be extracted at every DELTAt. In CPU13, only a cycle T or nT is added to the extracted data to store the same in memory RAM10. Therefore, the stored information is constant regardless of a detection period and luminous intensity being the time average thereof also becomes constant. After the completion of memory, order is issued to the moving apparatus 17 and the detector 1 is moved to the next measuring point and, after all of data were taken in, the irregularity of luminous intensity is calculated by CPU13. If the timewise irregularity at the same point is calculated, the detector 1 does not move. By this constitution, an apparatus not generating the variation in detected luminous intensity according to a detection period due to the effect of the voltage frequency of a power source is obtained.
申请公布号 JPS62106324(A) 申请公布日期 1987.05.16
申请号 JP19850247609 申请日期 1985.11.05
申请人 CANON INC 发明人 SUZUKI TAKEHIKO;MATSUMURA TAKASHI
分类号 H01L21/30;G01J1/42;H01L21/027 主分类号 H01L21/30
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