| 摘要 |
PURPOSE:To facilitate positioning to improve the positioning precision by forming a positioning mark which can be seen with visible rays. CONSTITUTION:In case of production of a glass substrate where transparent electrodes 3 and positioning marks 4 consisting of an ITO are provided on one face of a glass plate 2, transparent electrodes 3 and positioning marks 4 are made different in film thickness by the time difference between film formation of transparent electrodes 3 and that of positioning marks 4, and the light transmittance of transparent electrodes 3 is not reduced but that of positioning marks 4 is reduced. The time difference is provided between film formation of transparent electrodes 3 and that of positioning marks 4 and transparent electrodes 3 and positioning marks 4 are formed with the ITO having about 800A film thickness and that having about 600A film thickness respectively to reduce the light transmittance of positioning marks 4 to about 30% without reducing >=80% light transmittance of transparent electrodes 3. As the result, a TV camera or the like is used to detect positioning marks 4 with visible rays and positioning is automatized. |
