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发明名称
Verfahren und Vorrichtung zum Reinigen von Trichlorsilan
摘要
申请公布号
DE1667742(A1)
申请公布日期
1971.06.24
申请号
DE19671667742
申请日期
1967.08.11
申请人
TEXAS INSTRUMENTS INC.
发明人
JOHN MOLTZAN,HERBERT;FYFFE,DE-WINN
分类号
C01B33/08
主分类号
C01B33/08
代理机构
代理人
主权项
地址
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