发明名称 PROPER MIXTURE FOR PROCESSING PHOTORESIST COMPOSITION AND PROCESSING OF PHOTORESIST COMPOSITION AND METHOD OF PEELING PHOTORESIST FROM BASE BODY
摘要 1. Organic solvent for stripping and cleaning film bases provided with cured or uncured resin-like positive-working or negative-working photoresist mixtures and for diluting said photoresist mixtures, characterized in that it is composed of a mixture of about 1 to 10 parts by weight of propylene glycol alkyl ether acetate and about 1 to 10 parts by weight of propylene glycol alkyl ether.
申请公布号 JPS62105145(A) 申请公布日期 1987.05.15
申请号 JP19860253904 申请日期 1986.10.27
申请人 AMERICAN HOECHST CORP 发明人 DANA DAAHAMU
分类号 G03F7/004;G03F7/42 主分类号 G03F7/004
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