| 摘要 |
PURPOSE:To bring an open groove part of a uniform width to a laser scribe working at a high speed by forming a laser beam to a condensing spot which has a shape being parallel to the scanning direction and also shows a flat optical intensity distribution, by a field diaphragm means. CONSTITUTION:A thin object 2 to be worked is set onto an XY table 1, and said object 2 to be worked is irradiated by condensing a laser beam 8 from a laser oscillator 3, through a laser optical system consisting of a collimator lens 4, a reflecting mirror 5, a condensing lens 6, etc., and an open groove part is brought to a laser scribe working by scanning a condensing spot of the laser beam 8 on the surface to be worked. In a laser beam device of said constitution, a field diaphragm body 18 having a square diaphragm hole 18a is provided in a system of said laser optical system, and said condensing spot is formed in the direction being parallel to the scanning direction and also so as to show a flat optical intensity distribution. |
