| 摘要 |
PURPOSE:To prevent the damage due to the corrosion of aluminum which is the main constituent material of a turbo-molecular pump by a method wherein at least one or more bent parts are provided on a pipleine part. CONSTITUTION:A growing chamber 1 and a turbo-molecular pump are connected with a bent pipe 6. As a result, gas molecule comes into collision with the bent pipe 6 at least once or more times before it reaches the turbo-molecular pump 8. The bent pipe and a chamber are maintained at the room temperature or thereabout, and as the temperature of the vapor pressure at 7.5X10<-9>Torr is 380 deg.C in the case of As, the As is cooled and solidified when the As comes in contact with the chamber or the bent pipe 6. As a result, the As does not reach the turbo-molecule 8, and an aluminum rotor, a stator and the like can be prevented from corrosion.
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