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发明名称
GERAET ZUM BELICHTEN VON LICHTEMPFINDLICH BESCHICHTETEN MATERIALIEN
摘要
申请公布号
DE3539690(A1)
申请公布日期
1987.05.14
申请号
DE19853539690
申请日期
1985.11.08
申请人
BASF AG
发明人
ECKLE,ALBRECHT;JAEKEL,BERND;KLINSMANN,UWE,DR.;BRITSCH,HELMUT
分类号
G03F9/00;G03B27/06;G03F7/20;H05K3/00;(IPC1-7):G03F7/20;G03B27/02;G03B27/20;H05K3/06
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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