| 摘要 |
PURPOSE:To enable highly accurate measurement and analysis on an object to be measured about desired measuring items handily, by irradiating an object to be measured with white X-rays while the transmission X-ray through the object is measured with an X-ray detector. CONSTITUTION:White X rays emitted from an X-ray source 1 is reduced with a wide-angle slit plate 2 to turn to a false monochromic X-ray through filter and the X ray is made to irradiate an object A to be measured. Here, the false monochromic X-ray of a low energy EL and a high energy EH relatively are extracted with the respective filters F1 and F2 to irradiate the object A being measured. Therefore, the white X rays emitted from X ray source 1 and reduced with the slit 2 initially turns to a false monochromic X-ray EL through a set filter F1, which is made to irradiate the object A to be measured. The transmission X-ray through the object A being measured reduced with a multislitter 3 and the intensity of the transmission X-ray is measured with X-ray detectors arranged in an array. When the data obtained are analyzed, the distribution of one composition is determined on one section of base material. Then, when the filter F1 is changed to F2, likewise, the distribution of another composition is determined. |
