| 摘要 |
PURPOSE:To reduce the number of cables between an XY stage and an exposing unit body by detecting the presence or the state of a semiconductor wafer on the stage to emit a light emitting diode connected with a solar battery. CONSTITUTION:A semiconductor wafer 12 is placed on a wafer chuck 13 on an XY stage having an X stage 4X and a Y stage 4Y, attracted and held by the chuck 13. When a detecting element for detecting the presence or the stage of an element to be detected detects the wafer 12, a detecting element connects light emitting diodes 3X, 3Y with a battery 2 connected with a solar battery 1. A detector provided at an exposing apparatus body receives lights from the diodes 3X, 3Y to control the related elements of the body.
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