| 摘要 |
PURPOSE:To improve the accuracy of a stop position by providing individually operable chuck mechanisms via piezoelectric actuators capable of changing the longitudinal distance with the applied voltage on both sides of a master drive mechanism moving along a guide section together with a slave drive mechanism. CONSTITUTION:To move a table 5 to a preset position, first it is moved to an approximate position via a signal of a position detecting shaft 4 by using a slave drive section 8. Next, bearing 12 and the table 5 are precisely moved to the right or left by the intermittent advance motion of a master drive section 6, i.e., the alternate clamp of hydraulic chucks 14b, 14a to a main guide shaft 2 and the shift of a piezoelectric actuator 13b or 13a between them. Next, after a positioning operation of the master drive section 6, i.e., the chuck 14b firmly clamps the shaft 2 and the chuck 14a tightens the shaft 2 with an adequate pressure, the voltage is applied to the actuator 13b until a lug 7 matches a preset position 4a, and the chuck 14a is driven to be clamped to the shaft 2. Accordingly, a resistance pressure is applied to a sliding face during the shift to prevent self-excited vibrations during the stop. |
