| 摘要 |
PURPOSE:To perform positioning of a table with no necessity for a high accurate guide surface, by providing spring parts, consisting of many arm parts, in both end parts in the width direction of a supporting structure and mounting a table to the upper end. CONSTITUTION:An upper piece 21 of a supporting structure 12 interlocks to a table 22 by lifting it by an actuator 23. If the upper piece 21 rises, plural arm parts 16, whose one end is connected with the upper piece, turn while elastically deforming both end small thickness parts 17. While here plural arm parts 16, connecting their one end with a bottom piece 19, similarly turn while elastically deforming both end small thickness parts 17. Accordingly, the table 22 comes to be lifted by the actuator 23 by the same dimension to this extension dimension. That is, the table 22 can be finely displaced. |
