| 摘要 |
PURPOSE:To uniformly obtain transparent film having a good interruption property for gas at a high speed, by carrying out vapor deposition while maintaining the ratio of average Al vapor deposition quantity to introduced gaseous oxygen quantity per unit time to a specified range, at forming aluminum oxide layer on a plastic film in a vacuum vessel. CONSTITUTION:At coiling the plastic film 5 set in the vacuum vessel 1 to a shaft 4 for coiling the film 5 while running it from a shaft 2 for rewinding the film 5 along a cooling drum 3, high purity Al is vaporized from crucible in a vaporizer 6 connected to heating electric source. Gaseous oxygen is supplied to a range surrounded with a mask 7 from a gas blowing hole 8 through a gas flow rate controller 9 from a gas bomb 10. In this time, aluminum oxide is vapor deposited on the film 5 while maintaining the ratio of the vaporized quantity A(mol/min) to the introduced quantity B(mol/min) to 0.2<=B/A<0.75.
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