| 摘要 |
The invention relates to a method of manufacturing a spring (10) of the cylindrical type to be used at high temperatures. This spring (10) is made of refractory material, such as quartz, boron nitride or graphite. It is constituted by recesses (111 to 117) not adjoining each other, having a height h and which are distributed along a helical line. The method of manufacturing utilizes a wire saw for forming these recesses in a cylindrical tube, which is subjected to a rotation after each sawing operation. The absence of microcracks imparts a high elasticity to the spring up to high temperatures. It is used for transmitting movements at high temperatures, more particularly when conditions of perfect cleanliness are desired, as, for example, in the case of semiconductor metallurgy. |
