| 摘要 |
PURPOSE:To measure the absolute value of the amount of processes, by generating interference of light beams by using the first mirror and the second mirror, whose surface is not flat, and detecting the change in interference pattern based on the change in configuration of the second mirror. CONSTITUTION:Light from a light source 2 that can be interfered is transmitted to a temperature detector 5 through a light path 6, a light splitter 3, and a light path 7. Part 71 of the light is reflected by a first mirror 54. The light, which has passed the first mirror 54, is reflected by a second mirror 55. The reflected light beams 71 and 72 are inputted to a signal processor 4 through the light path 7, the light splitter 3, and a light path 8. The shape of the second mirror 55 is made in a non-flat shape. The signal processor 4 detects the change in interference pattern based on the change in configuration of the second mirror 55. |
