CRYOPUMP WITH IMPROVED ADSORPTION CAPACITY

摘要

CRYOPUMP WITH IMPROVED ADSORPTION CAPACITY A cryopump 20 with increased adsorptive capacity comprising a honeycomb adsorption structure 46 positioned within a second stage chevron assembly 40. Multiple chambers 58 of the honeycomb are covered with adsorbent charcoal 68. The entire structure 46 is attached to a second stage 52 of a cryogenic refrigerator 45.