发明名称 |
Pure water manufacturing apparatus |
摘要 |
A pure water manufacturing apparatus for producing ultra pure water to be used in the electronic and medical industries. This apparatus comprises a pure water circulation system consisting of a pure water storage tank, a first heat exchanger arranged at the downstream side of the tank for thermally sterilizing pure water, a filter arranged at the downstream side of the first heat exchanger for removing dead bacteria, a pure water circulating means, and a second heat exchanger for cooling pure water disposed between the filter and a terminal device at which pure water is required. The ultrapure water is supplied to the terminal device from the downstream side of the filter through the second heat exchanger.
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申请公布号 |
US4664793(A) |
申请公布日期 |
1987.05.12 |
申请号 |
US19850791536 |
申请日期 |
1985.10.25 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MURAKAMI, KENJI;KONOMATU, YOSITAKA;SATO, KANRO |
分类号 |
C02F1/44;B01D61/00;B01D65/00;B01D65/02;C02F1/02;F24D17/00;H01L21/00;(IPC1-7):C02F1/02 |
主分类号 |
C02F1/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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