| 摘要 |
PURPOSE:To increase the sensitivity of a sensor by forming a light absorbing region on a substrate with a low thermal conductivity and a small heat capacity and disposing a pyroelectric detecting element in the region. CONSTITUTION:Supported by four pillars 2 planted to a glass mount 1 at its four corners, for example, a 2mm square and 9mum thick Mylar film 3 is tensely mounted. An approximately 1.4mm square platinum electrode 4 is formed in the center of the film 3 by a sputtering and a platinum black 5 is formed on the surface of the electrode 4, forming a light absorbing region. A plate 6 wherein platinum electrode films are deposited by a sputtering on both sides of an approximately 0.05mm square LiTaO3 single crystal (Z plate) as a pyroelectric detecting element is mounted to the upper surface of the platinum electrode 4 by a conductive adhesive7. The platinum black 5 is mounted to the platinum electrode on the upper surface of the Z plate 6 like the light absorbing region. A lead wire 9 is led out from the platinum electrode on the upper surface of the Z plate 6 and the platinum electrode 4 constituting the light absorbing region. The structure described above can increase the sensitivity and responsiveness of a sensor. |
