| 摘要 |
PURPOSE:To remove the retention of a gas when not in use of the gas, and to prevent even the lowering of the purity of the gas by conducting the supply and interruption of the gas to a reaction section by a branching valve fitted to a connecting section in which the gas flows in a circulating manner. CONSTITUTION:In each device 21-1, 21-2, 21-3, branching valves 29-1, 29-2, 29-3 are opened respectively when using hydrogen gas, the valves are closed when not in use, and branching valves 30-1, 30-2, 30-3 are each opened when using nitrogen gas, and the valves 30-1, 30-2, 30-3 are closed when not in use, thus arbitrarily selecting hydrogen gas or nitrogen gas, then supplying respective reaction section 22-1, 22-2, 22-3 with the gas. Each branching valve 29-1, 29-2, 29-3 and 30-1, 30-2, 30-3 is fitted directly or at the shortest distance to respective reaction section at that time, thus preventing the retention of a not used gas even when either gas is not employed, then resulting in no possibility in which the purity of the gas lowers. Reaction sections 22 are mounted adjacent to branching valves 29, and the gas, which is branched from connecting sections 25 and flows out, is fed directly to the reaction sections 22 when the branching valves 29 are opened.
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