| 摘要 |
PURPOSE:To permit the dust-free traveling in the curved part by positioning and traveling a trolley which is floated up by the air supplied from a ceiling injection hole in the rectilnear part of a box-shaped duct, by the air supplied from the holes on the both sides, and suppressing the deflection by an inside guide roller in the cuved part. CONSTITUTION:In a rectilinear part 2, a pressure receiving surface 9A for floating-up receives the air A1 supplied from an upward injection hole 6, and a floating-up trolley 8 is floated up, and the pressure receiving surfaces 9B and 9C for determining width receive the air A2 and A3 supplied from the horizontal injection holes 7A and 7B, and the trolley 8 is positioned in the direction of width. Therefore, when liner motors 11 and 12 are operated, the trolley 8 travels in noncontact state in the rectilinear part 2. Through, in the curves part 3, the trolley 8 which comes in noncontact state from the rectilinear part 2 is deflected outwardly by a centrifugal force, an inner guide roller 10A contacts the opposed side plate 1B, and the deflection over a prescribed quantity is suppressed. Therefore, in the curved part, the trolley can be traveled in the contact system where dust formation is exceedingly little, and the traveling on the curved passage in a clean room is permitted.
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