| 摘要 |
PURPOSE:To produce a good electrically connected state while the excessive spreading of probe scars is controlled by vibrating relatively the probers to the electrode pads. CONSTITUTION:A wafer 1 supply-placed on a table 4 is vacuum-attracted by attracting holes 4a and is held fixedly, and at the same time, the wafer is positioned by the movement of the table 4 to X, Y and theta directions. Subsequently, when the table 4 is made to relatively ascend, probes 7 of a probe card 5 are respectively abutted on each electrode pad 3 of pellets 2 located at the prescribed positions on the wafer 1 and are electrically connected. At this time, a good electrically connected state of the probes 7 and the electrode pads 3 is produced because the table 4 is vibrated by a vibrator 10 in the horizontal direction. In this state, when a tester of a prober is operated, an exchange of communications is conducted between the pellets 2 coming into contact to the probes 7 and the tester through the probe card 5, the probes 7 and the electrode pads 3 and a test for electrical characteristics is conducted. |
