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发明名称
CVD THIN FILM FORMING DEVICE
摘要
申请公布号
JPS6299470(A)
申请公布日期
1987.05.08
申请号
JP19850240180
申请日期
1985.10.26
申请人
HITACHI ELECTRONICS ENG CO LTD
发明人
TAKAMI KATSUMI;HIKIMA HITOSHI;TANIGUCHI KAZUO;KISHIMOTO SATORU;MURAKAWA YUKIO
分类号
H01L21/31;C23C16/30;C23C16/40;C23C16/44;C23C16/46
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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