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发明名称
ELECTRICAL DISCHARGE ELECTRODE FOR PLASMA CVD DEVICE
摘要
申请公布号
JPS6299476(A)
申请公布日期
1987.05.08
申请号
JP19850239426
申请日期
1985.10.28
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
NAKAMURA NOBUO;SHIMADA JUICHI;MATSUBARA SUNAO;ITO HARUO;MURAMATSU SHINICHI
分类号
C23C16/50;H05B7/20
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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