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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPS6298547(A)
申请公布日期
1987.05.08
申请号
JP19850238846
申请日期
1985.10.24
申请人
NISSIN ELECTRIC CO LTD
发明人
KAWAKAMI TOSHIO;NAGAI NOBUO
分类号
H01L21/265;C23C14/48;H01J37/04;H01J37/317
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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