CVD THIN FILM FORMING DEVICE,申请号JP19850240183-传众专利搜索

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发明名称	CVD THIN FILM FORMING DEVICE
摘要
申请公布号	JPS6299473(A)	申请公布日期	1987.05.08
申请号	JP19850240183	申请日期	1985.10.26
申请人	HITACHI ELECTRONICS ENG CO LTD	发明人	TAKAMI KATSUMI;MURAKAWA YUKIO;KISHIMOTO SATORU;TANIGUCHI KAZUO;HIKIMA HITOSHI
分类号	H01L21/31;C23C16/30;C23C16/40;C23C16/46	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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