发明名称 |
ROTOR ASSEMBLY FOR A TURBO MOLECULAR PUMP |
摘要 |
A turbo-molecular pump characterized in that three out of five degrees of freedom except the rotation around the rotational axis of a shaft are actively controlled constrainingly by a pair of magnetic radius direction bearings and a pair of magnetic axial bearings, a bell-shaped rotor provided to cover the whole of magnetic bearing and a shaft which is supported by a magnetic bearing passively constraining the remaining two degrees of freedom, and said rotor is rotated at high speed by an inner-rotor type of a driving motor provided between a radius direction bearing and axial bearing.
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申请公布号 |
GB2130655(B) |
申请公布日期 |
1987.05.07 |
申请号 |
GB19830030794 |
申请日期 |
1983.11.18 |
申请人 |
* SEIKO INSTRUMENTS & ELECTRONICS LTD |
发明人 |
MASAHARU * MIKI;CHIAKI * URANO |
分类号 |
F04D19/04;F04D29/04;F04D29/058;F16C39/06;(IPC1-7):F04D29/04 |
主分类号 |
F04D19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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