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发明名称
VORRICHTUNG UND VERFAHREN FUER DIE CHEMISCHE DAMPFABSCHEIDUNG
摘要
申请公布号
DE3634130(A1)
申请公布日期
1987.05.07
申请号
DE19863634130
申请日期
1986.10.07
申请人
EPSILON LTD.
发明人
DE BOER,WIEBE B.;F. JENSEN,KLAVS;L. JOHNSON,WAYNE;W. READ,GARY;ROBINSON,MCDONALD
分类号
C23C16/46;C23C16/44;C23C16/455;C23C16/54;C30B25/14;(IPC1-7):C23C16/46
主分类号
C23C16/46
代理机构
代理人
主权项
地址
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