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发明名称
RADIATION SENSITIVE POLYMER COMPOSITION
摘要
申请公布号
EP0119719(B1)
申请公布日期
1987.05.06
申请号
EP19840300837
申请日期
1984.02.09
申请人
TORAY INDUSTRIES, INC.
发明人
OHBAYASHI, GENTARO;UMEMOTO, SUSUMU;HIRAMOTO, HIROO
分类号
C08L77/00;G03F7/037;G03F7/038;(IPC1-7):G03C1/68;G03F7/10
主分类号
C08L77/00
代理机构
代理人
主权项
地址
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