| 摘要 |
PURPOSE:To increase the rate of film coating in a difference part in level by providing a slant on a target face generating a plasma ring and by making the adhesion quantity of a filming material on both a side wall part of the difference in level of the difference part in level and a flat part on the surface of a base material uniform. CONSTITUTION:The target faces opposite to a base plate 1 to be coated wherein the targets 2-2, 2-3 have a shape of an axis-symmetrical rotating body form are provided with the slanted faces (e.g. angles theta1 and theta2). The targets are divided into every members contg. the slanted faces and each member is electrically insulated from each target member. Voltage is impressed from the electric power sources 29, 30 to the insulated members respectively and independently. Furthermore the closed magnetic fields 19, 20 which start from each slanted face and reenter the same slanted face are formed on each slanted face. |
