| 摘要 |
PURPOSE:To improve measuring accuracy of the state of the surface of a sample, by using a scanning type electronic microscope, photographing the surface of the sample at desired angles and directions, processing the three-dimensional images of various images in an image processing device, and outputting the result to a recorder. CONSTITUTION:A sample is sent in a sample chamber 2 of a scanning type electronic microscope (SEM) 1. A sample table is inclined or rotated, and SEM images are obtained at the desired angles and directions. The image outputs are inputted in an image processing device 3. Theimages, which are obtained at the desired angles and directions, are synthesized. The irregular shapes of the surface of the sample are reproduced, and the heights of the irregularities and the like are obtained. The outputs from the image processing device 3 are inputted in an X-Y plotter 4. The three-dimensional graphics corresponding to the SEM and the cross-sectional shape at an arbitrary place at the surface of the sample are plotted on the X-Y plotter 4. These images are overlapped on the SEM screen. Thus the measuring accuracy of the shape of the surface of the sample can be improved. |
