| 摘要 |
PURPOSE:To reduce damage in sputtering and to implement a long life, by using an electrode, which is formed with composite perovskite oxides that are expressed by a chemical formula Ln1-xMxM'O3 (where Ln is lanthanoid, M is alkaline earth element and M' is transition metal element) at least as a surface layer. CONSTITUTION:A cathode electrode 1 and an anode electrode 2 are formed in a Chern electrode shape and constituted by composite perovskite oxide 3 and 4 such as Ln1-xSrxCoO3. The composite perovskite oxides 3 and 4 have metal-type electric conductivity. Even if they are the oxides, they can be well used as a gas laser electrode. The sputter resisting characteristic of the oxide is more excellent than that of ordinary metals. In the case of an excimer laser, its life is affected by the yield of uneven discharge rather than gas adsorption is sputtering action. Anyway, the life is affected by the sputtering action. Therefore, by using the electrodes 1 and 2, durability against an ion bombardment is improved, and the life can be elongated by an order of magnitude in comparison with a conventional electrode. |
