Vacuum pump system including serially connected rotary and reciprocating vacuum pumps

摘要

A vacuum pump includes a rotary vacuum pump including a pair of rotors cooperating to suck gas, a driving source connected to a shaft of one of the pair of rotors, timing gears connected to respective shafts of the rotors and transmitting the driving force of the driving source between the shafts of the pair rotors, and a reciprocating vacuum pump connected to the driving source and connected to the downstream side of the rotary vacuum pump for sucking gas therefrom.