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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6295814(A)
申请公布日期
1987.05.02
申请号
JP19850235143
申请日期
1985.10.23
申请人
HITACHI LTD
发明人
KURODA TAKARO;WATANABE AKISADA;TSUJI SHINJI;OISHI AKIO;MATSUMURA HIROYOSHI
分类号
H01S5/00;C30B29/40;H01L21/20;H01L21/205
主分类号
H01S5/00
代理机构
代理人
主权项
地址
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