| 摘要 |
PURPOSE:To provide a thermal head imparting printing quality and having long life, by applying photoetching and thermal oxidizing treatment to a second protective layer not only to eliminate the depression of a heat generating resistor layer but also impart abrasion resistance to said resistor layer. CONSTITUTION:A partially glazed layer 2 having an almost semicircular arc shape is formed on an insulating substrate 1 and a heat generating resistor layer 3 and a feeder body layer 4 are laminated onto said glaze layer 2 and the heat generating resistor layer 3 is formed so as to be positioned on the almost top surface of the glaze layer 2. A first protective layer 5 is formed on said resistor layer 5 from a material having good oxidizing property and a second protective layer 6 is formed thereon from a low oxide and low nitride material able to be etched and capable of imparting abrasion resistance. Thereafter, the part of the protective layer 1a is removed to provide a protruded part on the heat generating resistor layer 3. By baking a thermal head in an electric furnace having an air atmosphere, O2 is diffused throughout the second protective film to convert said protective film into highly oxidized Ta2O5 having good abrasion resistance as a whole. By this method, the center of heat generation can be most closely slid with a thermal recording medium and high density printing can be performed at low power. |
