SEMICONDUCTOR MANUFACTURING EQUIPMENT,申请号JP19850235554-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号	JPS6294948(A)	申请公布日期	1987.05.01
申请号	JP19850235554	申请日期	1985.10.22
申请人	SEIKO EPSON CORP	发明人	OTSUKI YASUMASA;YOSHIOKA TOSHIO
分类号	H01L21/66;G01R31/26	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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