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发明名称
APPARATUS FOR FORMING THIN FILM
摘要
申请公布号
JPS6294918(A)
申请公布日期
1987.05.01
申请号
JP19850234578
申请日期
1985.10.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORI EISAKU
分类号
H01L21/203;H01L21/26
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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