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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6293929(A)
申请公布日期
1987.04.30
申请号
JP19850234742
申请日期
1985.10.21
申请人
TOSHIBA CORP
发明人
USU TOSHIHIKO
分类号
H01L29/78;H01L21/265
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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