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发明名称
PLASMA ETCHING OF SILICON SEMI CONDUCTORS
摘要
申请公布号
AU6392386(A)
申请公布日期
1987.04.30
申请号
AU19860063923
申请日期
1986.10.15
申请人
FRENCH STATE, THE
发明人
DANIEL HENRY;RODERICK BOSWELL
分类号
H01L21/3065;H01L21/311;H01L21/3213
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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