| 摘要 |
PURPOSE:To obtain an integrated circuit package cooling apparatus with pipings which can be disconnected without fear of liquid leakage when maintenance, inspection and repair of the integrated circuit packages are carried out by arranging a piping system to supply coolant to a cooling jacket and a piping system to supply gas in parallel through changeover means. CONSTITUTION:During normal operation, valves 13 and 14 are closed and valves 11 and 12 are opened and coolant is supplied to respective integrated circuits or integrated circuit packages 2 to cool them. When connectors 5 of coolant pipings 10 are disconnected, the valves 11 and 12 are closed to discontinue the flow of the coolant. Then the valves 13 and 14 are opened to discharge the coolant through a drain 10D by purging gas. Therefore, the connectors 5 can be disconnected without fear of liquid leakage. |
