| 摘要 |
A method of desorbing water vapor molecules from the interior wall surfaces of a vacuum chamber by irradiating the inner wall surface by ultraviolet radiation. During the irradiation of the inner wall surfaces by the ultraviolet radiation, the vacuum chamber is kept under vacuum. The wavelength of the ultraviolet radiation is preferably a combination of two basic wavelengths: a first wavelength of 183 nanometers, and a second wavelength 254 nanometers. The ultraviolet radiation source is a conventional ultraviolet lamp. The lamp is connected to an exterior power source. After radiation the inner wall surface of the vacuum chamber with ultraviolet radiation, the desorbed water molecules are pumped away by the pumps of the vacuum system. Any wavelength falling within the ultraviolet band of the spectrum may be used for irradiating the inner wall surfaces of the vacuum chamber.
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